Available List
Available List
System Parts List
| System Model | Parts Description | PN |
|---|---|---|
| LAM Kiyo 300mm | PCBA, ESC PWR SPLY | 810-107813-117 |
| PCBA, PWR SPLY, ESC, HVBP | 810-107813-306 | |
| ASSY, PCB, PWR SPLY, ESC, BICEP II | 810-495659-006 | |
| ASSY, PCB, PWR SPLY, ESC, BICEP Q | 810-495659-304 | |
| ASSY, PCB, PWR SPLY, ESC, BICEP II | 810-495659-307 | |
| ASSY, PCB, PWR SPLY, ESC, BICEP II | 810-495659-308 | |
| PCBA, PWR SPLY, ESC, BICEP, HV-RP | 810-495659-410 | |
| PCBA, PWR SPLY, ESC, BICEP, 2KV-RP, IS | 810-495659-431 | |
| PCBA, PWR SPLY, ESC, BICEP, 2KV-RP, IS | 810-495659-531 | |
| PCBA, MAINTENANCE ADAPTOR, ESC PWR | 810-A13289-001 | |
| AMAT Centura 300mm | MAGNET DRIVE ASSY 01 | 0190-02703 |
| CT HV MODULE ASSY, CESC | 0010-16690 | |
| CN Visible Filter | 0900-01063 | |
| CO Visible Filter | 0900-01064 | |
| AMAT Centura 200mm | Mag Driver | 0190-70060 |
| Emax HV Module | 0010-12553 | |
| SuperE HV Module | 0010-04926 | |
| Centura Endpoint Module | 0010-36543 | |
| Hot Pack Module | 0010-10973 | |
| Centura EDP Fiber | 0190-09455 | |
| AMAT Centura 200mm | EMAX Magnet Current Sense Card | 0100-01133 |
| 8 Channel Emission Laser Endpoint PCB Card | 0100-09172 | |
| HV Module Assy, RF Box GECO | 0010-10901 | |
| HV Module 5KV Assy, 200mm CESC | 0010-11239 | |
| Fiber Optic Cable 20FT | 0190-09459 | |
| Fiber Optic Cable Bifurcate, 25'L | 1120-01071 | |
| AMAT P5000 200mm / 150mm |
Mag Driver | 0190-70060 |
| MXP HV Module | 0010-09933 | |
| P5000 Endpoint Module | 0010-10551 | |
| P5000 EDP Fiber | 0190-09134 | |
| EMAX Magnet Current Sense Card | 0100-01133 | |
| 8 Channel Emission Laser Endpoint PCB Card | 0100-09172 | |
| HV Module Assy, RF Box GECO | 0010-10901 | |
| Fiber Optic Cable 20FT | 0190-09459 | |
| Mattson AspenII 200mm | Fiber Optic Cable Bifurcate, 25'L | 1120-01071 |
| AO PCB | 559-12711-00 | |
| Interface PCB | 181-91000-00 | |
| Operator PCB | 255-06515-00 | |
| Analog Filter Board | 146-93000-00 | |
| Capacitor 1 | 510-08660-00 | |
| Capacitor 2 | 510-18633-00 | |
| RF Coil | 263-06185-00 |